Abstract
ABSTRACT Integrated multimode interference coupler based on silicon-on-insulator has been become a kind ofmore and more attractive device in optical systems. Thin cladding layers (<1 .Opin) can be used in SO! waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. Here we demonstrate the design and fabrication of multimode interference (MMI) opticalcouplers and optical switches in 501 technology.Keywords: 501, Multimode Interference, Optical coupler, optical switch, Integrated Optics 1. INTRODUCTION Optical couplers and switches are the key devices in the integrated optics. In recent years, multimode interference(MMI) couplers, based on the self-imaging effect, are rapidly gaining popularity because of the advantage of such aslow-loss, compact size and large fabrication tolerance21. Couplers based on MMI structure have been realized invarious materials such as InP, SiO2, and GaAs and excellent performance has been reported35. Silicon-on-insulator
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