<title>Glass microprocessing by laser-induced plasma-assisted ablation: fundamental to industrial applications</title>

Abstract

Laser-induced plasma-assisted ablation (LIPAA), in which a single conventional pulsed laser of small size is employed (typically 2^nd harmonic of Nd:YAG laser), enables to process transparent materials like glass with micron order spatial resolution, high speed and low cost. In this process, a laser beam is first directed to a glass substrate placed in vacuum or air. The laser beam passes through the substrate since the wavelength of laser beam must have no absorption by the substrate for the LIPAA process. The transmitted laser beam is absorbed by a solid target (typically metal) located behind the substrate. The target is then ablated, resulting in plasma generation. Due to the interaction of the laser beam and the laser-induced plasma, significant ablation takes place at the rear surface of substrate. This process demonstrates surface microstructuring, crack-free marking, color marking, painting and selective metallization of glass. Based on these achievements, we have developed a prototype of workstation of LIPAA microfabrication system which is now commercially available. The discussion includes mechanism and practical applications in industry of LIPAA process.