Abstract

Thin films of SnO2 when suitable doped are used for the detection of H2S and H2 gases. The results of the characterization showed that the gas sensing properties of the films are governed by the micro-structure, dopant used and the operating temperature of the film. For the H2S gas sensors developed, the observed change in the conductivity for 10 ppm gas concentration was approximately 104. By suitably altering the film resistance at ambient temperature, SnO2 based sensors have been developed which can detect 100 ppb H2S gas present in the environment.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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