Abstract
Microlenses were formed directly on a surface of a glass plate by using CO<sub>2</sub> laser. This method has the merit of complete dry processing and presents simple way of microlens fabrication. We discuss about the formation process and mechanism through the characterization of irradiation parameters and the glass composition. When the surface of a glass plate is heated locally to a working point of the glass material by a focused CO<sub>2</sub> laser beam, a microlens is formed owing to surface tension. It was found possible to fabricate microlens easily placed at different focal position by controlling a laser power and an irradiation time. The volume of the fabricated microlens was found to be dependent on laser irradiation energy (laser power x irradiation time) and irradiated position. When a Corning 7059 glass plate was used, a convex microlens was obtained at the energy density smaller than ca. 100 (μJ/μm<sup>2</sup>).
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