Abstract
The epitaxial growth of LiNbO3 films by the ArF excimer laser ablation is demonstrated to form electro-optic (EO) thin-film waveguides on sapphire and LiTaO3 c-plates. The x- ray diffraction spectra indicate that the resulting films are well oriented along the c axis when a Li-rich LiNbO3 ceramics is used as the target. The chemical composition of the film was successfully evaluated by measurement of the extraordinary index ne on the basis of the guided-wave excitation with prism couplers. Stoichiometric films are grown on both sapphire and LiTaO3 c-plates by changing the content of excess Li2O in the target. The propagation loss of 6 dB/cm was attained in the thin-film waveguide on LiTaO3 c- plate. In addition, the EO effect of the film was roughly estimated by fabrication and characterization of a light deflector with an EO grating.© (1994) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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