Abstract
Reflection microlenses for oblique incidence can be flexibly used without a beam splitter, and also could be key devices in planar optics and optical interconnections with a zigzag optical path within the substrate. The functions of the electron-beam writing system that we developed have been expanded so that the diffraction-limited microlenses for oblique incidence can be fabricated. It is demonstrated that electron-beam written microlenses including rectangular- apertured lens array exhibit the diffraction-limited focusing characteristics with 78% high efficiency at a large oblique angle of 30 degree(s).© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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