<title>Efficient accoustic-wave damping in a high-pulse-repetition-rate XeCl laser</title>

Abstract

Acoustic phenomena may play a leading role in high average power excimer laser as soon as a high pulse repetition rate is achieved. In this paper we demonstrate both experimentally and theoretically that acoustic wave generation and evolution are strongly dependent on electric arcs appearing at the end of the discharge. These acoustic waves induce a strong decrease of laser power throughout an amplification phenomenon of pressure fluctuations at high PRF. Acoustic dampers allow us to reduce this phenomenon and to increase the laser output power up to 50%.