<title>Development of a linear piezoelectric motor based on the inchworm model</title>

Abstract

ABSTRACT The development of a linear transducer type piezoelectric motor is shown. This design utilises theInchworm principle and features a cylindrical device operating inside a metal tube. The motor iscapable of developing high translational forces with macro and micro positioning capabilities. It consists of two cylindrical clamping elements separated by a central driver element which are physically connected but capable of independent operation through three multi-layer actuator stacksconnected to a three channel controller. Inchworm type movement is possible through sequentialactivation of the three elements which allows linear motion along the tube. The prototype motor has undergone a series of static and dynamic tests which demonstrate the successful operation ofthe device. Static tests show that with both clamping elements operating, loadsof up to 45N can be held in place with no overall movement. Dynamic tests show that loads of up to22N can be lifted before clamp slippage becomes a problem. Using 100 volt supply signals and verymodest driving frequencies, translational velocities of up to 4.4 mm/mm have been recorded. Infuture, if the speed of the motor needs to be increased, more powerful amplifiers should be able todrive the motor at higher frequencies and thus greater velocities.Keywords: Inchworm motor, linear motion motor, piezoelectric motor, linear transducer motor.