<title>Design of a micro-Wankel rotary engine for MEMS fabrication</title>

Abstract

This paper presents the design of a micro Wankel engine for deep etching micro fabrication. The micro engine design is part of a research program in progress to develop a micro actuator to supply torque for driving micro machines. To begin with, the research work concentrates on the micro Wankel engine powered by liquid CO<SUB>2</SUB>. Then, a Wankel internal combustion engines will be investigated. The Wankel engine is a planetary rotation engine. It is selected because of its largely 2D structure which is suitable for lithographic processes. The engine has been simplified and redesigned to suit the fabrication processes. In particular, the fuel inlet has been moved to the top cover of the housing from the side, and the outlet is made as a groove on the housing, so that the both parts can be etched. A synchronization valve is mounted on the engine to control the supply of CO<SUB>2</SUB>. One of advantages of the micro engines is their high energy density compared with batteries. A research study has been conducted in comparing energy densities of commonly used fuels. It shows that the energy densities of fuels for combustion engines are 10 - 30 times higher than that of batteries. The deigns of the micro Wankel engines have been tested for verification by finite element analysis, CAD assembly, and construction of a prototype, which proves the design is valid.