Abstract
Abstract. We report on our activities in the design, fabrication, characterization andsystem integration of planar micro-optical elements. Microlens arrays, gratings, dif-fusers, beam shapers and beam splitters have been fabricated, tested and integrated in chemical analysis systems (iTAS, fluorescence detection), tracking sensors for satellites, displacement sensors, optical lightpipes, LCD projector illumination, pho-tospectrometers, neural networks and multiple channel imaging systems for photo- lithography. Packaging and alignment strategies for sensors and optical microsys- tems were investigated. 1. Introduction Microfabrication technologies like photolithography, resist processing and reactive ion etching(RIE) were used to manufacture arrays of refractive and diffractive micro-optical elements. Themicro-optical elements were transfered in fused silica by RIE and replicated in polycarbonat andepoxy by embossing and casting techniques. The surface profile and the wave aberrations werecharacterized by interferometrical testing. The surface roughness was measured by atomic forcemicroscopy.
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