<title>Confocal microscopy for visualization and characterization of porous silicon samples</title>

Abstract

We have developed a scanning confocal microscopy (SCM) system which can be used to investigate micro-structural properties of samples with micro-geometry. We present advantages of this imaging technique for visualization and characterization of some periodic and non-periodic (porous silicon with an alveolar columnar structure (1.5 - 3 μm pores diameters)) samples. Using the confocal microscopy, we can obtain an enhancement of image resolution and contrast, in comparison with conventional optical microscopy. Therefore, it has particular advantages for the study of porous silicon. Confocal imaging method permit the "optical sectioning" of samples and lead to a sub-micron resolution both in lateral plane and axial plane.