Abstract
Our study concerns the coherent spatial shaping of lasers beams emitted by an excimer laser and was carried out in the optical laboratory of IRCOM. High power lasers in general and excimer lasers in particular are known for the poor spatial quality of their beams. In a conventional cavity (for instance built with two plane parallel mirrors and with a large Fresnel number), this kind of laser exhibits a powerful laser beam but in a wide divergence angle because of the large number of spatial transversal modes. This multimode beam provides an homogeneous time integrated illumination useful in surface processes applications. Such a kind of multimode beam is frequently called <<TOP HAT BEAM <<. For others applications like micro-machining or drilling we need a powerful and low divergence beam. That mean's this beam contains a low number of spatial modes and its divergence angle is closed to the diffraction limit in order to be focused in a minimal size spot. The brightness of this beam is higher than the brightness of the multimode beam. We have called this beam a << HIGHBRIGHTNESS BEAM <<. For this kind of applications we study a new method to produce an high brightness beam with minimum angular divergence A iE (according to the beam diameter D) using an excimer amplifying medium.
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