Abstract
One of the authors has proposed an electrostatically driven torsional resonator with two degrees of freedom (TDF). The main characteristic of the TDF resonator, in which the electrode gap does not directly affect to inconsistencies between low voltage driving and a large range of motion, is reported. The TDF structure is also beneficial for achieving high Q values. However, size reduction was difficult because of the limitations of the fabrication process. In this study, the TDF resonator is miniaturized by the UV-LIGA (UV exposed lithography and electroplated structure) process. The process and the frequency characteristics of the resonator are reported.
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