Abstract

In this paper a software method for electrical capacitance sensor design of electrical capacitance tomography system is presented by using finite element analysis techniques. Electrical capacitance sensor theory model is established, and capacitance sensitivity field distribution and structure parameters of the sensor to measurement effect are analyzed by the method. The optimized design and simulation of electrical capacitance sensor is based on the method, and performances of electrical capacitance sensor are improved clearly, satisfactory images can be reconstructed by using the capacitance sensitivity distributions as a priori information. It provides powerful support for further application research.

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