Abstract

Multilayer interference structures (MIS) consisting of alternating diamond-like layers with different parameters were investigated. The structures with periods from 68 Angstrom up to 21 angstrom were obtained by ion-plasma methods. Properties of diamond-like MIS and diamond-like films were studied by x-ray diffraction measurements in the range 1.54 angstrom - 11.8 angstrom and ESCA. The numerical computations of reflecting ability of multilayer diamond-like structures were carried out. The difference between experimental and theoretical results are discussed. It is shown experimentally the feasibility of creating wideband mirrors for the soft x-ray range using diamond-like layers with different electron densities.

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