Abstract
Intensive research in the development of Electro Discharge Machining (EDM) has led to highly sophisticated EDM machines suited for conventional precision engineering purposes as well as for microcomponent fabrication. Recently, increased attention has been paid to the exploration of Micro-EDM ((mu) -EDM). It could be shown that within EDM applications especially the electrodes quality, its handling and the adjustment procedures determine the accuracy of the machined product. This paper describes various electrode fabrication methods and further introduces the development of an actuator for (mu) -EDM. Driven by piezoelements it provides 3D vibrations of electrode or workpiece which enhances EDM- process performance significantly. Furthermore, the first steps integrating a vision control system into an EDM- machine are described. Problems, occurred hereby, are stated and analyzed. The demonstration of several (mu) -EDM applications accompanies the technical information and shows the extensive possibilities of the technology.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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