<title>94-GHz MMIC CPW low-noise amplifier on InP</title>

Abstract

High performances have been achieved at W-band with a 2- stage, 0.1 micrometers gate-length InGaAs/InAlAs/InP LM-HEMT MMIC low noise amplifier in coplanar technology. To obtain the T- gate profile, we use silicon nitride Si<SUB>x</SUB>N<SUB>y</SUB> technology, which leads to naturally passivated devices. For a drain-to-source current Ids equals 350 mA/mm the devices demonstrate a maximum intrinsic transconductance Gm of 1600 mS/mm and an intrinsic current gain cutoff frequency Fc equals 220 GHz. The extrinsic current gain cut-off frequency Ft is 175 GHz. The LNA shows a minimum noise figure of 3.3 dB with an associated gain of 11.5 dB at 94 GHz.