Abstract

In this contribution the design and fabrication of ceramic microsystems with integrated different microfluidic elements and sensors will be presented. Ceramic microsystems are based on unconventional application of low-temperature co-fired ceramic technology and materials. This unconventional application is related to three-dimensional ceramic structures, such as cantilevers, ledges, bridges, diaphragms, valleys, channels, holes and cavities, valves, mixers, diffusors, distributors, collectors, flow limiters, sensors, and actuators.

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