<title>Integrated Optoelectronic Silicon Devices for Optical Signal Processing and Communications</title>

Abstract

Integrated optoelectronic devices will be considered in which optical fibers are coupled to optical channel waveguides and in which both optical slab and channel waveguides are coupled to detectors. Use of Si02/Si substrates allows formation of low loss waveguides, smooth V-groove channels for both channel waveguides and fiber support channels and sophisticated detector configurations such as charge-coupled device (CCD) linear arrays. We will discuss a slab waveguide-CCD detector coupling structure which has been experimentally characterized by a high degree of uniformity along the linear array, minimal excessive optical scattering and very low charge transfer inefficiency. Coupling of light from optical fibers to channel waveguides and from an array of channel waveguides to a CCD linear array is demonstrated. Applications of the various device structures considered to integrated optical spectrum analysis, optical transversal filtering, and time multiplexing of a number of fiber optical communication channels are discussed.