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Abstract
Low temperature grown GaAs has been fabricated containing a limited amount of excess arsenic. The material has a low conductivity in the order of 100KΩ cm, due to hopping in a deep donor band. This σ-LT-GaAs was grown reproducibly by using the lattice mismatch as the primary parameter for substrate temperature calibration. Breakdown fields, in the order of 100kV/cm, are observed for planar structures and increased at low measurement emperatures. Low hopping conductivity and high breakdown field are also observed in the lossy dielectric metal-insulator-semiconductor field-effect transistor device using σ-LT-GaAs as a surface layer. The record radio frequency power density of 4.0W/mm at 77K is extracted from the dc output characteristics.
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