LS-SVM을 이용한 TFT-LCD 패널 내의 결함 검사 방법

Abstract

Normally, to extract the defect in TFT-LCD inspection system, the image is obtained by using line scan camera or area scan camera which is achieved by CCD or CMOS sensor. Because of the limited dynamic range of CCD or CMOS sensor as well as the effect of the illumination, these images are frequently degraded and the important features are hard to decern by a human viewer. In order to overcome this problem, the feature vectors in the image are obtained by using the average intensity difference between defect and background based on the weber`s law and the standard deviation of the background region. The defect detection method uses non-linear SVM (Supports Vector Machine) method using the extracted feature vectors. The experiment results show that the proposed method yields better performance of defect classification methods over conveniently method.