Abstract
The application of low voltage scanning electron microscopy (LVSEM) to the characterization of polymers and non-conducting materials, other than semiconductors, has not been well explored yet. Some of the theoretical considerations and practical limitations which prevented the development of commercial instruments have mostly been addressed with the result that machines are now available which are optimized for low voltage (≥ 0.5 kV) operation. The advantages of working at low voltages are beginning to be recognized outside the semi-conductor industry. When we image uncoated polymer surfaces at low beam energies (0.5-1.5 kV), no beam damage or charging artifacts are experienced, because in this region the emitted electrons are equal to or more than the incident electrons and there is no deposition of charge underneath the surface due to the lower penetration of the incident electrons.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
