Abstract

In this paper, gate-induced pentacene semiconductor strain sensors based on hybrid-gate dielectrics using poly-vinylphenol (PVP) and high-K inorganic, Ta<sub>2</sub>O<sub>5</sub> are fabricated on flexible substrates, polyethylene naphthalate (PEN). The Ta<sub>2</sub>O<sub>5</sub> gate dielectric layer is combined with a thin PVP layer to obtain very smooth and hydrophobic surfaces which improve the molecular structures of pentacene films. The PVP-Ta<sub>2</sub>O<sub>5</sub> hybrid-gate dielectric films exhibit a high dielectric capacitance and low leakage current. The sensors adopting thin film transistor (TFT)-like structures show a significantly reduced operating voltage (~6V), and good device characteristics with a field-effect mobility of 1.89 cm<sup>2</sup>/V&bull;s, a threshold voltage of -0.5 V, and an on/off ratio of 10<sup>3</sup>. The strain sensor, one of the practical applications in large-area organic electronics, was characterized with different bending radii of 50, 40, 30, and 20 mm. The sensor output signals were significantly improved with low-operating voltages.

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