Low-Temperature Variation of Acoustic Velocity in PDMS for High-Frequency Applications.

Abstract

Polydimethylsiloxane (PDMS) and other related silicon-based polymers are among the most widely employed elastomeric materials in microsystems, owing to their physical and chemical properties. Meanwhile, surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors and filters have been vastly explored for sensing and wireless applications. Many fields could benefit from the combined use of acoustic wave devices, and polydimethylsiloxane-based soft-substrates, microsystems, or packaging elements. The mechanical constants of PDMS strongly depend on frequency, similar to rubber materials. This brings to the exploration of the specific mechanical properties of PDMS encountered at high frequency, required for its exploitation in SAW or BAW devices. First, low-frequency mechanical behavior is confirmed from stress strain measurements, remaining useful for the exploitation of PDMS as a soft substrate or packaging material. The study, then, proposes a temperature-dependent, high-frequency mechanical study of PDMS based on Brillouin spectroscopy to determine the evolution of the longitudinal acoustic velocity in this material, which constitutes the main mechanical parameter for the design of acoustic wave devices. The PDMS glass transition is then retrieved by differential scanning calorimetry in order to confirm the observations made by Brillouin spectroscopy. This paper validates Brillouin spectroscopy as a very suitable characterization technique for the retrieval of longitudinal mechanical properties at low temperature, as a preliminary investigation for the design of acoustic wave devices coupled with soft materials.