Low-temperature growth and direct transfer of graphene–graphitic carbon films on flexible plastic substrates

Abstract

We demonstrate low-temperature growth and direct transfer of graphene–graphitic carbon films (G–GC) onto plastic substrates without the use of supporting materials. In this approach, G–GC films were synthesized on copper layers by using inductively coupled plasma enhanced chemical vapor deposition, enabling the growth of few-layer graphene (G) on top of Cu and the additional growth of graphitic carbon (GC) films above the graphene layer at temperatures as low as 300 °C. The patterned G–GC films are not easily damaged or detached from the polymer substrates during the wet etching and transfer process because of the van der Waals forces and π–π interactions between the films and the substrates. Raman spectroscopy reveals the two-dimensional hexagonal lattice of carbon atoms and the crystallinity of the G–GC films. The optical transparency and sheet resistance of the G–GC films are controlled by modulating the film thickness. Strain sensors are successfully fabricated on plastic substrates, and their resistance modulation at different strains is investigated.