Abstract
The possibility of practical realization of a two‐stage chemical vapor deposition (CVD) process using as an example of nanocomposite coating “molybdenum disulfide (filler)–silicon oxide (matrix)” is experimentally demonstrated for the first time. Deposition is performed in a two‐zone vertical tubular quartz reactor. The formation of molybdenum disulfide nanoparticles by spray pyrolysis is carried out in the upper zone, and the lower zone is used for deposition of nanocomposite coatings by atmospheric pressure plasma‐enhanced CVD. An aerosol of the ammonium thiomolybdate solution in dimethylformamide is used for the synthesis of molybdenum disulfide particles, and silicon dioxide coatings are deposited from tetraethoxysilane. The structure and the composition of nanocomposite coating deposited are studied using scanning electron microscopy (SEM), transmission electron microscopy (TEM), Raman, and Fourier transform infrared spectroscopy (FTIR) spectroscopy.
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