Abstract
Lightweight stages are becoming the new trend in industrial high performance motion systems. They are generally less stiff than the traditional designs and more pronounced resonant dynamics usually appear in low frequency region. Control design methods to deal with these flexible modes effectively are known as the Beyond Rigid Body (BRB) control. In high performance tracking control, such as wafer scanning and lithography, feedforward control is widely used to improve their tracking accuracy. In this paper, novel feedforward controllers are proposed to reduce tracking error of light-weight motion systems with presence of different rigid-body damping. Their performances are then compared with the traditional rigid body feedforward controller as well as the recently proposed snap feedforward controller to show the advantages.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
