Abstract
A low-energy electron gun for the energy range of 5–100 eV providing a uniform and high electron flux over a circular surface area of several cm2 has been designed and tested. Focusing elements allow one to vary the beam diameter according to experimental needs. The uniform current densities make it suitable for the study of electron stimulated surface chemistry and thin-film production.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Paper Title
Journal
Date
