Abstract

K and L cross sections for inner-shell ionization of low- Z elements by 0.5–1.5 MeV protons and helium ions were determined from the experimental X-ray production data. Proton K X-ray production cross sections were measured for NaCl, Mg, Al, SiO, GaP, CaF 2, Ti, V, Cr, Fe, Co, Ni and Cu targets and the corresponding L data were obtained for NaCl, Al, SiO, GaP, CaF 2, Ti, V, Cr, Fe, Co, Ni, Cu, Zn and As targets. Sample thicknesses were in the range of 30–60 μg/cm 2 but thick-target effects were also taken into account. Special care was given to the incident particle dose and the X-ray detector efficiency determination. Measured inner-shell ionization cross sections were compared with the results of the ECPSSR calculations.

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