Low-voltage MOBILE logic module based on Si/SiGe interband tunnelling diodes

Abstract

Si/SiGe interband tunnelling diodes have been grown by MBE on high resistivity (n/sup -/) silicon substrates. The device enables a very low voltage, high-speed logic on a silicon substrate. A novel self-aligned diode is processed using optical lithography and dopant-selective wet chemical etching. A maximum speed index for a 60 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> anode area device is evaluated to 2.2 ns/V resulting in a switching speed of 0.5 ns. A logic latch built of two series connected diodes (MOBILE principle) is demonstrated, showing very robust logic operation at a supply voltage as low as 0.3 V. The used technology may be employed for a co-integration with both SiGe heterostructure bipolar- and field-effect transistor technology and may contribute to future low-voltage high speed logic on Si substrates.