Abstract
AlGaN/GaN dual metal Schottky barrier diodes (SBD) are demonstrated on a silicon substrate. The anode is composed of two metals with different work functions to achieve a better trade-off between the forward and the reverse characteristics. The low work function metal Ti reduces the turn-on voltage and the high work function metal Ni at the edge of the anode reduces the reverse leakage current and maintains the breakdown voltage. The turn-on voltage of the Ni-SBD is reduced from 1.47V to 0.57V by employing the dual metal anode, and the breakdown voltages are virtually unaffected.
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