Abstract
ABSTRACTThermal expansion coefficients (TECs) for polyimides differ very much depending on their chemical structures. Polyimdes with a rod-like structure as their backbone chains have lower TEC values. This is attributed to restraining of thermal expansion by rod-like molecules within intermolecular spaces, analogous to glass fibers in FRPs. The development of new polyimides which can closely match TECs of inorganic materials, such as metal or Si, can eliminate problems produced by thermal stress including warping, cracking or delamination.A new multilevel interconnection system using multilayered dielectrics consisting of low thermal expansion polyimide and inorganic materials has been proposed as one future technology for submicron VLSIs. Consequently, adhesiveless, high quality flexible printed circuit boards have been developed using a polyimide with the same TEC as copper foil. Their most significant property is a high dimensional stability after heat treatments, such as in a soldering process. Furthermore, they have very high adhesion strength at elevated temperatures.
Published Version
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