Abstract
A thin film thermometer using sputtered zirconium nitride has been investigated as a low-temperature thermometer. This film deposited on a sapphire substrate can be used to measure a wide temperature range from 1 to 300 K with reasonable sensitivity within a fast response time. The thermometer sensitivity can be altered by changing fabrication conditions. Moreover, the thermometer is almost insensitive to magnetic fields. The temperature error in a magnetic field of 6 T is less than 10 mK at 4.2 K.
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