Abstract
The formation of the carbon microcoils could be achieved under the low temperature (550°C). Ni powders were used as the catalyst on the alumina substrate. C2H2 was used as a source gas and a few amount of SF6 gas were used as an additive gas under the thermal chemical vapor deposition system. The surface morphologies of as-grown carbon materials at the low temperature (550°C) were also investigated according to the total pressure and the injection time of SF6 flow. At 80Torr and 10min injection time of SF6 flow, the carbon microcoils were highly developed on the entire surface of the sample. The lower or higher total pressure and the longer injection time of SF6 flow deteriorated the formation of CMCs. The head area of the carbon microcoils was closely investigated and the growth mode for the initiation of the carbon microcoils at the low temperature was suggested.
Published Version
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