Abstract
Crystal growth of Cu-O, Y-Cu-O and Ba-Cu-O sputtered film were investigated in order to get informations with respects to a low temperature synthesis of a superconducting YBaCuO thin film. A triclinic (111) plane of a Cu0 phase was epitaxially grown on a Mg0 (100) plane at about 450 °C by a reactive dc sputtering. The Y-Cu-O and Ba-Cu-O films were prepared by a reactive rf sputtering in an atmosphere of mixed gas of Ar, O2 and N2O. In particular an irradiation of ultraviolet ray was effective to lower the crystallization temperature of a single Y2Cu2O5 phase by about 100°C.
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