Low Temperature SoIC Bonding and Stacking Technology for 12-/16-Hi High Bandwidth Memory (HBM)

Abstract

A low temperature system-on-integrated-chip (SoIC) bonding and stacking technology is proposed and implemented for 3-D memory integration, such as 3-D static random access memory (SRAM) or dynamic random access memory (DRAM) cube. It extends not only 2-D pin count to 12 000/mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> but also overcomes the obstacle of the stacking height. 4-Hi, 8-Hi, and 12-Hi stacks, each with 1 base die and 4, 8, and 12 dies, respectively, are realized and demonstrated in this article. The daisy chains in the 4Hi/8-Hi/12-Hi structures incorporating over 10000 through silicon vias (TSVs) and bonds are tested with liner I - V curves, which indicates the good bonding and stacking quality. The electrical link from base controller to top DRAM for 12-Hi and 16-Hi high bandwidth memory (HBM) structure is built up to study the bandwidth (BW) and power efficiency. Compared to μbump technology, the BW for the 12-Hi and 16-Hi structures using SoIC bonding shows the improvement of 18% and 20%, respectively, under same pin pitch and the power efficiency has the improvement of 8% and 15%. For thermal performance, the 12-Hi and 16-Hi SoIC-bond structure is 7% and 8% better than those using μbump technology, respectively. With this innovative SoIC bonding and stacking technology, the bond pitch is scalable to sub-micrometer and the die thickness is manageable to be thinner, which are prospected for the application of higher BW 3-D memory with tera byte (TB)/s per stack.