Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites.

Khaled Sayed Elbadawi Ramadan,Stephane Evoy,Sefer Bora Lisesivdin

doi:10.1371/journal.pone.0133479

Khaled Sayed Elbadawi Ramadan, Stephane Evoy + Show 1 more

Open Access

https://doi.org/10.1371/journal.pone.0133479

Copy DOI

Journal: PloS one	Publication Date: Jul 20, 2015
Citations: 7	License type: CC BY 4.0

Affiliation: University of Alberta

Abstract

Piezoelectric aluminum nitride thin films were deposited on aluminum-molybdenum (AlMo) metallic nanocomposites using reactive DC sputtering at room temperature. The effect of sputtering parameters on film properties was assessed. A comparative study between AlN grown on AlMo and pure aluminum showed an equivalent (002) crystallographic texture. The piezoelectric coefficients were measured to be 0.5±0.1 C m-2 and 0.9±0.1 C m-2, for AlN deposited on Al/0.32Mo and pure Al, respectively. Films grown onto Al/0.32Mo however featured improved surface roughness. Roughness values were measured to be 1.3nm and 5.4 nm for AlN films grown on AlMo and on Al, respectively. In turn, the dielectric constant was measured to be 8.9±0.7 for AlN deposited on Al/0.32Mo seed layer, and 8.7±0.7 for AlN deposited on aluminum; thus, equivalent within experimental error. Compatibility of this room temperature process with the lift-off patterning of the deposited AlN is also reported.

Highlights

Biological analysis technologies play an important role in many fields such as disease biomarker diagnosis and monitoring, drug discovery, and molecular analysis [1,2,3,4,5,6,7]
We have examined the use of such metallic glasses as a seed layer for the growth of Aluminum nitride (AlN) thin films
Atomic force microscopy was used to investigate the surface of both seed layers (Fig 3)

Summary

Introduction

Biological analysis technologies play an important role in many fields such as disease biomarker diagnosis and monitoring, drug discovery, and molecular analysis [1,2,3,4,5,6,7]. Established techniques include enzyme-linked immunosorbent assay (ELISA), western blotting, polymerase chain reaction (PCR), and fluorescence conjugated reagents. These assays require labels such as fluorescent dyes and enzymes to properly identify the target. Biosensors have been looked upon as alternative for the monitoring of various biological analytes. The specificity of biosensors is imparted by a probe such as a nucleic acid, an antibody, an enzyme, a cell or an artificial receptor.

Methods

Results

Conclusion