Low Temperature Operating Micro Solid Oxide Fuel Cells with Perovskite Type Proton Conductors

Abstract

We fabricated micro solid oxide fuel cells with perovskite type proton conductors on silicon substrates, and evaluated their electrical properties using electrochemical impedance spectroscopy (EIS). The cells with 15mol% yttrium-doped BaZrO3 and Pt-Pd electrodes could resist several thermal cycles from room temperature to 317oC, and they showed sufficient open circuit voltage over 1V around 300oC, if physical gas leakage was properly prevented. Maximum power density of cells reached 8.4mW / cm2 at 270oC. This value was quite promising for low temperature operation. But, the results of power generation test were so different each other and difference was sometimes over two orders of magnitude. EIS results indicated the contribution of electrolyte resistance to total resistance was small and those differences were due to the difference of electrode reaction components.