Abstract
AbstractTwo sets of hydrogenated microcrystalline silicon carbon alloys were deposited by standard radio frequency (RF) plasma enhanced chemical vapor deposition at a substrate temperature of 175 °C. The effect of the methane flow rate and of the RF‐power were investigated. Samples were deposited from a silane and methane gas mixture, highly diluted in hydrogen. The increase in methane flow rates leads to a decrease of the crystalline volume fraction and an increase in carbon incorporation. On the other hand, decreasing the RF‐power shifts the microcrystalline‐to‐amorphous transition at higher methane flow rates. Moreover, for similar amount of carbon incorporated, the decrease in RF‐power leads to materials showing higher crystalline volume fraction and average grains sizes. Both ion bombardment energy and carbon incorporation contributes to the microstructural properties of the deposited alloys. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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