Abstract
Homoepitaxial 4H-SiC thin films were grown on (0 0 0 -1) C-face substrate by cold-wall chemical vapor deposition (CVD) using bis-trimethylsilylmethane (BTMSM, C7H20Si2) precursor. Because of the polarity difference of C-face and (0 0 0 1) Si-face, epitaxial growth conditions of C-face was quite different from those of Si-face. To improve the quality of C-face epitaxial films, effects of epitaxial growth conditions on surface morphology and crystallinity of epitaxial films were investigated.
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