Low-Temperature Growth of Vertically Aligned Carbon Nanotubes on a Glass Substrate Using Low Power PECVD

Abstract

In the traditional PECVD method for growing carbon nanotubes (CNTs), the electric field is an important parameter. Its role is to orient CNT growth and dissociate the H-C bond from hydrocarbon gases. Therefore, high energy ions, molecules, and radicals as plasma elements can affect the verticality of CNTs. In this paper, a new configuration for an electric field for the growth of field-oriented and long CNTs on a glass substrate at temperatures below 400°C is reported. Simulation and experimental data show that CNTs are grown at a considerably lower voltage than traditional methods. Using this method, growing vertical CNT on such low-cost substrate glass is more possible for CNT-based devices and bio-applications where price is important.