Abstract
AbstractWe studied the nucleation and crystallization of sol-gel derived (Ba0.7Sr0.3)TiO3 [BST(70/30)] thin films at low temperatures between 500 to 600°C on Pt(111)/TiO2/SiO2/Si substrates by a process using a combination of 2-ethyl-hexanoate based solutions and modified film preparation. We found that BST films could be crystallized at 500°C and that the films obtained had a columnar-like grainy microstructure with favorable electrical characteristic such as high relative permittivity (ɛr) of 310 at 10 kHz and high tunability of 51% at a bias electric field of 250 kV/cm. Moreover, we investigated annealing temperature dependence of BST(70/30) thin films. The results indicated er and tunability increased with annealing temperature up to 450 and 58%, respectively.
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