Low Temperature Electroless Ni–P Catalyst Deposition Enhanced by UV Exposure for Carbon Nanofiber and Nanotube Growth

Abstract

Electroless Ni–P nanoparticles deposition enhanced by UV exposure was investigated to catalyze the synthesis of carbon nanotubes (CNTs) and carbon nanofibers (CNFs) by thermal chemical vapor deposition at for interconnect formation that can reduce process complexity. The Ni–P nanoparticles with a size of 6–15 nm were deposited by using a UV-assisted electroless plating on the trench wall at for CNF wiring formation. Besides, the Ni–P nanoparticles were selectively deposited at the bottom of the via-hole with a size of 100 nm by using electroless plating at for CNT-via formation.