Low-temperature deposition of TiO2by atmospheric pressure PECVD towards photoanode elaboration for perovskite and solid-state dye-sensitized solar cells

Amélie Perraudeau,Christophe Chazelas,Sylvain Vedraine,Christelle Dublanche-Tixier,Bernard Ratier,Pascal Tristant

doi:10.1051/epjpv/2019006

Abstract

An original low-temperature atmospheric pressure plasma-enhanced chemical vapor deposition process was used to deposit titanium dioxide thin films. The parametric study in dynamic mode deposition aimed at growing an ideal columnar film composed of aligned anatase monocrystals as solar cell photoanode, previously obtained on silicon wafers in static mode deposition. A process parameters optimization was necessary to deposit onto thermally sensitive glass/FTO substrates. In this paper, the morphology, crystallinity and optical transmission of the coatings have been studied. The coatings display a columnar cauliflower-like structure, composed of TiO2amorphous particles assembly. After deposition, the light transmission properties of the substrate were reduced. As a solution, an ultrasound bath cleaning was set up to enhance the transmitted light through the photoanode.

Highlights

The surface modification or thin film deposition are of great interest for many applications and could help the development of renewable energy technologies which are a challenge nowadays
The parametric study in dynamic mode deposition aimed at growing an ideal columnar film composed of aligned anatase monocrystals as solar cell photoanode, previously obtained on silicon wafers in static mode deposition
A process parameters optimization was necessary to deposit onto thermally sensitive glass/FTO substrates

Summary

Introduction

The surface modification or thin film deposition are of great interest for many applications and could help the development of renewable energy technologies which are a challenge nowadays. Several photovoltaic cells generations were developed, but among the third generation, the perovskite solar cells are recording a fast development lately [1,2]. Their multilayer structure is inspired by those of solid-state dye sensitized solar cells where the dye is replaced by a hybrid perovskite absorber. In this device structure, photogenerated electron-hole pairs are separated by electron transfer from the dye to an electron transporting layer (ETL) while the dye is regenerated by a hole transporting layer (HTL). Mesoporous ETL structure have proven to both insure good interface area with the dye and

Methods

Results

Conclusion