Abstract
ABSTRACT Ferroelectric PZT thin films were deposited by liquid delivery MOCVD using a cocktail solution of Pb(DMAMP)2, Zr(MMP)4 and Ti(MMP)4 with ECH. This cocktail solution was stable at least 3 months and perfectly vaporized above 290°C. Deposited films were crystallized into perovskite PZT phase with preferred 111-orientation at the substrate temperature of 400°C. We believe that this solution is suitable for PZT deposition at a low substrate temperature.
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