Low Temperature Crystallization of Bismuth Zinc Niobate Thin Films by Pulsed Laser Annealing

Abstract

Low temperature crystallization of chemical solution derived Bi 1.5 Zn 0.5 Nb 1.5 O 6.5 films by using pulsed laser annealing was achieved. The effects of laser energy density, irradiation time and film thickness on the sample structure and electrical properties were systematically studied. Crystallized films were obtained with laser irradiation at room temperature, but laser induced defects degrade the dielectric strength of the film and increase the dielectric loss. It was found that the crystallinity and dielectric properties were significantly improved after a post-annealing at 400°C for 2h in oxygen atmosphere. Bi 1.5 Zn 0.5 Nb 1.5 O 6.5 films with dielectric properties comparable to that of rapid thernal annealed samples were achieved at temperatures ? 400°C, which makes integration with polymeric substrates possible.