Abstract
The vibration interference in ultra-precision machining and measurement seriously restricts the processing quality and measurement accuracy, especially for the vacuum use environment and ultra-low frequency vibration interference. The magnetic vibration isolator (MVI) are used for vibration isolation. In this paper, a novel low stiffness MVI with Halbach permanent magnet array is proposed. The outer stator adopts two layers of permanent magnet (PM) and the inner mover adopts one layer of PM structure for lower stiffness. The bearing capacity and maximum vertical stiffness within ±1 mm displacement of the MVI are 1065.80 N and 702.84 N/m, which greatly improves the low-frequency vibration isolation performance of the MVI.
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