Low-reflectance laser-induced surface nanostructures created with a picosecond laser

Abstract

Using high-speed picosecond laser pulse irradiation, low-reflectance laser-induced periodic surface structures (LIPSS) have been created on polycrystalline silicon. The effects of laser fluence, scan speed, overlapping ratio and polarization angle on the formation of LIPSS are reported. The anti-reflective properties of periodic structures are discussed, and the ideal LIPSS for low surface reflectance is presented. A decrease of 35.7 % in average reflectance of the silicon wafer was achieved over the wavelength range of 400–860 nm when it was textured with LIPSS at high scan speeds of 4000 mm/s. Experimental results of broadband reflectance of silicon wafers textured with LIPSS have been compared with finite difference time domain simulations and are in good agreement, showing high predictability in reflectance values for different structures. The effects of changing the LIPSS profile, fill factor and valley depth on the surface reflectance were also analyzed through simulations.