Abstract
An RF plasma discharge in oxygen has been investigated both experimentally and theoretically. The excited species in the oxygen plasma were detected by means of spontaneous luminescence spectroscopy. A self-consistent numerical model was developed for these discharges. The model was confirmed by several theoretical and experimental investigations. The spatial distribution over the discharge gap of both charged and neutral plasma components and their fluxes to electrodes have been calculated.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
