Abstract
Low pressure plasma, its characteristics, excitation sources and applications are shortly presented. The paper is focused on three areas of low pressure plasma spectroscopy, i.e. spectrochemical analysis, investigation of technology processes and fundamental reference data. Matrix effects occurring in spectrochemical analyses by means of hollow cathode discharges are presented. Investigation and monitoring of processes of production of new materials in glow discharges are shown. Applicability of low pressure plasma for the determination of atomic (transition probabilities) and molecular reference data (electronic, vibrational and rotational constants) and utilization of molecular data are discussed.
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